Integrated Microsystems - Research

The Integrated Microsystems prgram benefits from a close relationship with the NSF-Engineering Research Center for Wireless Integrated Microsystems (WIMS-ERC) which is headquartered in the University of Michigan College of Engineering. This center is focused on the intersection of three key areas: microelectronics, wireless communications, and MEMS. The resulting integrated microsystems will soon provide button-sized, information gathering nodes for applications ranging from environmental monitorin to healthcare. The WIMS-ERC is working to make these microsystems a reality. It is developing the technology base needed to produce them, including precision sensors, micropower circuits, wireless interfaces, and wafer-level packaging.

Oven

The Michigan Nanofabricated Facility (MNF) offers complete facilities for the fabrication of integrated microsystems. This facility is a part of the National Nanotechnology Infrastructure Network (NNIN).