Integrated Microsystems - Complete List of Courses

College of Engineering Course Catalog

UM Schedule of Classes

Integrated Microsystems Schedule of Classes

Aerospace Engineering Courses

  • AERO 464 The Space Environment
    Prerequisites: senior or graduate standing in a physical science or engineering; I; 3 Credits
    An introduction to physical and aeronomical processes in the space environment. Discussion of theoretical tools, the Sun, solar spectrum, solar wind, interplanetary magnetic field, planetary magnetosphere, ionospheres and upper atmospheres. Atmospheric processes, densities, temperatures, and wind.
  • AERO 510 Finite Elements in Mechanical and Structural Analysis
    Prerequisites: Aero 315; I; 3 Credits
    Prerequisites: senior or graduate standing in a physical science or engineering; I; 3 Credits
    Introductory level. Finite element solutions for structural dynamics and nonlinear problems. Normal modes, forced vibrations, Euler buckling (bifurcations), large deflections, nonlinear elasticity, transient heat conduction. Computer laboratory based on a general purpose finite element code.
  • AERO 511 Finite Elements in Mechanical and Structural Analysis II
    Prerequisites: Aero 510 or ME 505, (ME 505); II; 3 Credits
    Intermediate level. Finite element solutions for structural dynamics and nonlinear-ear problems. Normal modes, forced vibration, Euler buckling (bifurcation), large deflections, nonlinear elasticity, transient heat conduction. Computer laboratory based on a general purpose finite element code.
  • AERO 524 Aerodynamics II
    Prerequisites: Aero 325; II; 3 Credits
    Two- and three-dimensional potential flow about wings and bodies; complex- variable methods; singularity distributions; numerical solution using panel methods. Unsteady aerodynamics; slender-body theory. Viscous effects: airfoil stall, high-lift systems, boundary-layer control. Wings and bodies at transonic and supersonic speeds; numerical methods.

Biomedical Engineering Courses

  • BiomedE 410 Design and Applications of Biomaterials (MSE 410) (MACROMOL 410)
    Prerequisites: MSE 220 or 250 or permission of instructor; I; 4 Credits
    Biomaterials and their physiological interactions. Materials used in medicine/ dentistry: metals, ceramics, polymers, composites, resorbable smart, natural materials. Material response/degradation: mechanical breakdown, corrosion, dissolution, leaching, chemical degradation, wear. Host responses: foreign body reactions, inflammation, wound healing, carcinogenicity, immunogenicity, cytotoxicity, infection, local/systemic effects.
  • BiomedE 456 Biomechanics
    Prerequisites: BiomedE 231 ME 211; 1; 3 Credits
    Definition of biological tissue and orthopedic device mechanics, including elastic, viscoelastic and non-linear elastic behavior. Emphasis on structure function relationships. Overview of tissue adaptation and the interaction between tissue mechanics and physiology.
  • BiomedE 525 Cellular and Molecular Networks
    Prerequisites: Biol 105 or Biol 112 and Math 215.; II; 3 Credits
    This course is designed to equip the student with appropriate concepts and techniques for the quantitative analysis of the integrated behavior of complex biochemical systems. A general approach is developed from the basic postulates of enzyme catalysis and is illustrated with numerous specific examples, primarily from the microbial cell.

Chemical Engineering Courses

  • ChemE 412 Polymeric Materials
    Prerequisites: MSE 220 or 250; I; 4 Credits
    The synthesis, characterization, microstructure, rheology, and properties of polymer materials. Polymers in solution and in the liquid, liquid-crystalline, crystralline, and glassy states. Engineering and design properties, including viscoelasticity, yielding, and fracture. Forming and processing methods. Recycling and environmental issues.
  • ChemE 414 Applied Polymer Processing
    Theory and practice of polymer processing. Non-Newtonian flow, extrusion, injection-molding, fiber, film, and rubber processing. Kinetics of and structural development during solidification. Physical characterization of microstructure and macroscopic properties. Component manufacturing and recycling issues, compounding and blending.
  • ChemE 542 Intermediate Transport Phenomena
    Prerequisites: graduate standing to be arranged; 3 Credits
    Foundations of transport phenomena. Heat and mass transfer with chemical reaction in three dimensions, selective motion. Unsteady energy and mass balances in three dimensions. Distributions in more than one variable. Boundary layer theory. Estimation of interfacial transport coefficients. Dispersive flows: Taylor Dispersion. Application to equipment design.
  • ChemE 548 Electrochemical Engineering
    Prerequisites: ChemE 344; To be arranged; 3 Credits
    Analysis of electrochemical systems from a theoretical and practical point of view. Topics include the application of electrochemical thermodynamics and kinetics to batteries, fuel cells, electroplating, electrosynthesis, and corrosion.

Civil and Environmental Engineering Courses

  • CEE 460 Design of Environmental Engineering Systems
    Prerequisites: CEE 360; I; 3 Credits
    Design and theoretical understanding of environmental processes; biological, physical, and chemical processes, and reactor configurations commonly used for water quality control; applications to the design of specific water and wastewater treatment operations; discussion of pollution prevention and green engineering options.
  • CEE 528 Flow and Transport in Porous Media
    Prerequisites: CEE 428 or equivalent; II; 3 Credits
    Basic principles governing flow and transport in porous media; development of mathematical models at pore and continuum levels; single and multiphase flow; solute unsaturated groundwater flow, flow in fractured media, petroleum reservoirs, saltwater intrusion and miscible and immiscible subsurface contamination.
  • CEE 541 Soil Sampling and Testing
    Prerequisites: preceded or accompanied by CEE 445; I; 3 Credits
    Field and laboratory practice in sampling and testing of soils for engineering purposes. Field sampling and testing; standard split-spoon sampler, Dutch Cone penetrometer, field vane, Iowa borehole shear device. Lab tests; direct shear, unconfined compression, triaxial compression, consolidation. Laboratory and lecture.

Electrical Engineering and Computer Science Courses

  • EECS 411 Microwave Circuits I
    Prerequisites: EECS 330 or graduate standing; I; 4 Credits
    Transmission-line theory, microstrip and coplanar lines, S-parameters, signal-flow graphs, matching networks, directional couplers, low-pass and band-pass filters, diode detectors. Design, fabrication, and measurements (1-10GHz) of microwave-integrated circuits using CAD tools and network analyzers.
  • EECS 413 Monolithic Amplifier Circuits (pdf)
    Prerequisites: EECS 311, EECS 320; I; 4 Credits
    Analysis and design of BJT and MOS multi-transistor amplifiers. Feedback theory and application to feedback amplifiers. Stability considerations, pole-zero cancellation, root locus techniques in feedback amplifiers. Detailed analysis and design of BJT and MOS integrated operational amplifiers. Lectures and laboratory.
  • EECS 414 Introduction to MEMS (pdf) (Take this or ME 553, not both)
    Prerequisites: Math 215, Math 216, Physics 240 or graduate standing I; 4 Credits (Also offerred through Distance Learning )
    Micro electro mechanical systems (MEMS), devices, and technologies. Micromachining and microfabrication techniques, including planar thin-film processing, silicon etching, wafer bonding, photolithography, deposition, and etching. Transduction mechanisms and modeling in different energy domains. Analysis of micromachined capacitive, piezoresistive, and thermal sensors/actuators and applications. Computer-aided design for MEMS layout, fabrication, and analysis.
  • EECS 421 Properties of Transistors
    Prerequisites: EECS 320 or graduate standing; I; 4 Credits
    In depth understanding of the device physics and working principle of some basic IC components: metal-semiconductor junctions, P-N junctions, metal-oxide-semiconductor junctions, MOSFETs and BJTs.
  • EECS 423 Solid-State Device Laboratory
    Prerequisites : EECS 320; I ; 4 Credits
    Semiconductor material and device fabrication and evaluation: diodes, bipolar and field-effect transistors, passive components. Semiconductor processing techniques: oxidation, diffusion, deposition, etching, photolithography. Lecture and laboratory. Projects to design and simulate device fabrication sequence.
  • EECS 425 Integrated Microsystems Laboratory (pdf)
    Prerequisites: EECS 311 or EECS 312 or EECS 414 or graduate standing; II; 4 Credits
    Development of a complete integrated microsystem, from functional definition to final test. MEMS-based transducer design and electrical, mechanical and thermal limits. Design of MOS interface circuits. MEMS and MOS chip fabrication. Mask making, pattern transfer, oxidation, ion implantation and metallization. Packaging and testing challenges. Students work in interdisciplinary teams.
  • EECS 427 VLSI Design I
    Prerequisites: EECS 270 and EECS 312 and EECS 320; I, II; 4 Credits
    Design techniques for rapid implementations of very large-scale integrated (VLSI) circuits, MOS technology and logic. Structured design. Design rules, layout procedures. Design aids: layout, design rule checking, logic, and circuit simulation. Timing. Testability. Architectures for VLSI. Projects to develop and lay out circuits.
  • EECS 430 Radiowave Propagation and Link Design
    Prerequisites: EECS 330 and senior standing; II; 4 Credits
    Fundamentals of electromagnetic wave propagation in the ionosphere, the troposphere, and near the Earth. Student teams will develop practical radio link designs and demonstrate critical technologies. Simple antennas, noise, diffraction, refraction, absorption, multi-path interference, and scattering are studied.
  • EECS 438 Advanced Laser and Optics Laboratory
    Prerequisites: EECS 334 or EECS 434; II; 4 Credits
    Construction and design of lasers; gaussian beams; nonlinear optics; fiber optics; detectors; dispersion; Fourier optics; spectroscopy. Project requires the design and set-up of a practical optical system.
  • EECS 509 BioMEMS (pdf)
    Prerequisites: none. II Alternate years (3 credits) (Also offered through Distance Learning)
    Latest advances in bioMEMS, specifically microsystems targeting developmental biology and cell culture. Organism's development, from genome to multicellular tissue. BioMEMS devices: microPCR chips, microfluidic mixers, tissue scaffolds. Familiarize students with microfabrication and microsystems. View and evaluate bioMEMS devices and innovations. Implantable and diagnostic microsystems. Critical evaluation of publications required. A principal component of the grade will be a written NSF or NIH exploratory proposal.
  • EECS 511 Analog-Digital Interface Circuits (pdf)
    Prerequisites: EECS 413 or permission of instructor. II (4 credits)
    This course covers most of the well known analog to digital conversion schemes. These include the flash, folding, multi-step and pipeline Nyquist rate, architectures. Oversampling converters are also discussed. Practical design work is a significant part of this course. Students design and model complete converters.
  • EECS 514 Advanced MEMS Devices and Technologies (pdf)
    Prerequisites: EECS 414. II (4 credits) (Also offered through Distance Learning)
    Advanced micro electro mechanical systems (MEMS) devices and technologies. Transduction techniques, including piezoelectric, electrothermal, and resonant techniques. Chemical, gas, and biological sensors, microfluidic and biomedical devices. Micromachining technologies such as laser machining and microdrilling, EDM, materials such as SiC and diamond. Sensor and actuator analysis and design through CAD.
  • EECS 515 Integrated Microsystems (pdf)
    Prerequisites: EECS 414. I (4 credits) (Also offered through Distance Learning)
    Review of interface electronics for sensors and drive and their influence on device performance, interface standards, MEMS and circuit noise sources, packaging and assembly techniques, testing and calibration approaches, and communication in integrated microsystems. Applications, including RF MEMS, optical MEMS, bioMEMS, and microfluidics. Design project using CAD and report preparation.
  • EECS 522 Analog Integrated Circuits
    Prerequisites: EECS 413; II; 4 Credits
    Review of integrated circuit fabrication technologies and BJT and MOS transistor models. Detailed analysis and design of analog integrated circuits, including power amplifiers, voltage references, voltage regulators, rectifiers, oscillators, multipliers, mixers, phase detectors, and phase-locked loops. Design projects. Lectures and discussion.
  • EECS 523 Digital Integrated Technology
    Prerequisites: EECS 423 or 425 and EECS 311 and EECS 320; I; 4 Credits
    Integrated circuit fabrication overview, relationships between processing choices and device performance characteristics. Long-channel device I-V review, short-channel MOSFET I-V characteristics including velocity saturation, mobility degradation, hot carriers, gate depletion. MOS device scaling strategies, silicon-on-insulator, lightly-doped drain structures, on-chip interconnect parasitics and performance. Major CMOS scaling challenges. Process and circuit simulation.
  • EECS 528 Principles of Microelectronics Process Technology
    Prerequisites: EECS 421, EECS 423; II; 3 Credits
    Theoretical analysis of the chemistry and physics of process technologies used in micro-electronics fabrication. Topics include: semiconductor growth, material characterization, lithography tools, photo-resist models, thin film deposition, chemical etching, plasma etching, electrical contact formation, micro-structure processing, and process modeling.
  • EECS 529 Semiconductor Lasers and LEDs
    Prerequisites: EECS 429; I; 3 Credits
    Optical processes in semiconductors, spontaneous emission, absorption gain, stimulated emission. Principles of light-emitting diodes, including transient effects, spectral and spatial radiation fields. Principles of semiconducting lasers; gain-current relationships, radiation fields, optical confinement and transient effects.
  • EECS 531 Antenna Theory and Design
    Prerequisites: EECS 330; II; 3 Credits
    Theory of transmitting and receiving antennas. Reciprocity. Wire antennas: dipoles, loops and traveling-wave antennas. Analysis and synthesis of linear arrays. Phased arrays. Input impedance and method of moments. Mutual impedance. Aperture antennas: slot, Babinet's principle. Microstrip antennas. Horns, reflector and lens antennas.
  • EECS 627 VLSI Design II
    Prerequisites: EECS 427; II; 4 Credits
    Advanced very large scale integrated (VLSI) circuit design. Design methodologies (architectural simulation, hardware description language design entry, silicon compilation, and verification), microarchitectures, interconnect, packaging, noise sources, circuit techniques, design for testability, design rules, VLSI technologies (silicon and GaAs), and yield. Projects in chip design.
  • EECS 830 Societal Impact Seminar (pdf)
    Prerequisites: Graduate Standing; 2 Credits
    This seminar is required for the Masters in Integrated Microsystems. The course will examine a number of important issues facing society and the roles that Microsystems can plan in their solution. The course will also review the impact of electronics on our present society and the lives of some of its key pioneers. Students will get a feeling for past challenges, for the pioneers. Students will get a feeling for past challenges, for the pioneers that helped address them, and for the future challenges that they themselves will address.

Industrial and Occupations Engineering Courses

  • IOE 425 (MFG 426) Manufacturing Strategies
    Prerequisites: Senior Standing; I, II; 2 Credits
    Review of philosophies, systems, and practices utilized by world-class manufacturers to meet current manufacturing challenges, focusing on "lean production" in the automotive industry, including material flow, plant-floor quality assurance, job design, work and management practices. Students tour plants to analyze the extent and potential of the philosophies.
  • IOE 449 Material Handling Systems
    Prerequisite: IOE 310, IOE 316; II alternate years; 2 Credits
    Review of material handling equipment used in warehousing and manufacturing. Algorithms to design and analyze discrete parts material storage and flow systems such as Automated Storage/Retrieval Systems, order picking, conveyors, automated guided vehicle systems, and carousels.
  • IOE 452 (MFG 455) Corporate Finance
    Prerequisite: IOE 201, IOE 310, IOE 366; I; 3 Credits
    The goal of this course is to introduce a basic understanding of financial management. The course develops fundamental models of valuation and investment from first principles and applies them to problems of corporate and individual decision-making. The topics of discussion will include the net present valuation, optimal portfolio selection risk and investment analysis, issuing securities, capital structure with debt financing, and real options.
  • IOE 466 (MFG 466) (Stat 466) Statistical Quality Control
    Prerequisite: IOE 265, (Stat 265), and IOE 366 or Stat 403; I, II; 3 Credits
    Quality Improvement Philosophies; Modeling Process Quality, Statistical Process Control, Control Charts for Variables and Attributes, CUSUM and EWMA, Short Production Runs, Multivariate Quality Control, Auto Correlation, Engineering Process Control, Economic Design of Cahrts, Fill Control, Precontrol, Adaptive Schemes, Process Capability, Specifications and Tolerances, Gage Capability Studies, Acceptance Sampling by Attributes and Variables, International Quality Standards.
  • IOE 511 Continuous Optimization Methods
    Prerequisites: Math 217, Math 417 or Math 419; I; 3 Credits
    Survey of continuous optimization problems. Unconstrained optimization problems: unidirectional search techniques; gradient, conjugate direction, quasi-Newton methods. Introduction to constrained optimization using techniques of unconstrained optimization through penalty transformations, augmented Lagrangians, and others. Discussion of computer programs for various algorithms.
  • IOE 533 Human Factors in Engineering Systems
    Prerequisites: IOE 333 and IOE 366; I; 3 Credits
    This course is designed to provide a basic perspective of the major processes of human motor behavior. Emphasis will be placed on understanding motor control and man-(machine)-environment interaction. Information processing will be presented and linked to motor behavior. Application of theories to the design of the workplace, controls and tools will be underlined and illustrated by substantial examples.

Material Science and Engineering Courses

  • MSE 410 (BiomedE 410) Design and Applications of Biomaterial)
    Prerequisites: MSE 220 or 250 or permission by instructor; I; 4 Credits
    Biomaterials and their physiological interactions. Materials used in medicine/ dentistry: metals, ceramics, polymers, composites, resorbable smart, natural materials. Material response/degradation: mechanical breakdown, corrosion, dissolution, leaching, chemical degradation, wear. Host responses: foreign body reactions, inflammation, wound healing, carcinogenicity, immunogenicity, cytotoxicity, infection, local/systemic effects.
  • MSE 501 Structure and Processing of Electrical Materials
    Prerequisites: MSE 440 or EECS 314; 2 Credits
    The role of chemistry, structure, and processing in determining the properties of electrical materials.
  • MSE 505 Material Science of Thin Films
    Prerequisites: MSE 242 and MSE 400 or equivalent; I; 3 Credits
    Thermodynamics and kinetics of film nucleation, growth, structure and stability for a single crystal, polycrystalline, and amorphous thin films.
  • MSE 562 Electron Microscopy I
    Prerequisites: MSE 460; II; 4 Credits
    An introduction to electron optics, vacuum techniques, and the operation of electron optical instruments. The theory and applications of transmission and scanning electron microscopy and electron microprobe analysis in the study of nonbiological materials.

Mechanical Engineering Courses

  • ME 401 Statistical Methods for Manufacturing Systems
    Prerequisites: Senior or Graduate Standing; II; 3 Credits
    Evolution of quality methods. Fundamentals of statistics. Process behavior over time. Concept of statistical process control (SPC). Design and interpretation of control charts. Process capability study. Tolerance. Measurement system analysis. Correlation. Regression analysis. Independent t-test and paired t-test. Design and analysis of two-level factorial experiments. Fractional factorial experiments. Response model building. Taguchi methods. Case studies.
  • ME 420 Fluid Mechanics II
    Prerequisites: ME 320; II; 3 Credits
    Control volume and streamline analysis for steady and unsteady flows. Incompressible and compressible flow. Hydraulic systems. Design of components. Losses and efficiency. Applications to centrifugal and axial flow machinery, e.g., fans, pumps, and torque converters.
  • ME 452 Design for Manufacturability
    Prerequisites: ME 350; I; 3 Credits
    Conceptual design. Design for economical production, Taguchi methods, design for assembly; case studies. Product design using advanced polymeric materials and composites; part consolidation, snap fit assemblies; novel applications.
  • ME 516 Mechanical of Thin Films and Layered Structures
    Prerequisites : ME 311 or graduate standing; I alternate years; 3 Credits
    Stresses and deformations in layered materials; energy-release rates and delamination; fracture mechanics of layered materials; spalling; interfacial fracture mechanics; mixed-mode fracture; buckling-driven delamination; cracking of thin films; effects of plasticity on fracture; stress-relaxation mechanisms in multi-layered materials; adhesion and fracture tests.
  • ME 533 Radiative Heat Transfer
    Prerequisites: ME 330; I; 3 Credits
    Electromagnetic, optical and quantum aspects of radiative equilibrium. Enclosure radiation including spatial, specular, and spectral distributions. Gas radiation including boundary affected thin gas and thick gas approximations. Averaged and spectral properties. Technological applications.
  • ME 541 Mechanical Vibration
    Prerequisites: ME 440; I; 3 Credits
    Time and frequency domain mathematical techniques for linear system vibrations. Equations of motion of discrete nonconservative systems. Vibration of multi-degree-of-freedom systems. Small oscillation theory. Free vibration eigenvalue problem. Undamped system response. Viscously damped systems. Vibration of continuous systems. Modes of vibration of bars, beams, membranes, plates.
  • ME 553 Microelectromechanical Systems (Take this or EECS 414, not both)
    Prerequisites: senior or graduate standing; II alternate years; 3 Credits
    Basic integrated circuit (IC) manufacturing processes; electronics devices fundamentals; microelectromechanical systems fabrications including surface micromachining, bulk micromachining, LIGA and others. Introduction to micro-actuators and microsensors such as micromotors, grippers, accelerometers and pressure sensors. Mechanical and electrical issues in micromachining. IC CAD tools to design microelectromechanical structures using MCNC MUMPs service. Design projects.
  • ME 559 Smart Materials and Structures
    Prerequisites: EECS 314 or equivalent; I alternate years; 3 Credits
    This course will cover theoretical aspects of smart materials, sensors and actuator technologies. It will also cover design, modeling and manufacturing issues involved in integrating smart materials and components with control capabilities to engineering smart structures.
  • ME 560 Modeling Dynamic Systems
    Prerequisites: ME 360; II ;3 Credits
    A unified approach to the modeling, analysis and simulation of energetic dynamic systems. Emphasis on analytical and graphical descriptions of state-determined systems using Bond Graph language. Analysis using interactive computer simulation programs. Applications to the control and design of dynamic systems such as robots, machine tools and artificial limbs.